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Controlled Chiller - List of Manufacturers, Suppliers, Companies and Products

Controlled Chiller Product List

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Temperature control chiller "ThermoRack1201"

Temperature control chiller "ThermoRack1201"

Optimal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Chiller for jacket tank temperature control

Chiller for jacket tank temperature control

A dedicated chiller for jacket tank temperature control that rapidly heats and cools the jacket tank temperature while maintaining high precision (+0.03 degrees)!

At AMU Refrigeration Co., Ltd., which manufactures and sells cooling water circulation devices (circulators), we offer the "Jacket Tank Temperature Control Dedicated Chiller." This chiller rapidly increases and decreases the temperature within the jacket tank while maintaining high precision (±0.03 degrees). The temperature control range is from -30°C to 120°C. 【Features】 ■ After performing auto-tuning once, everything is automatically optimized for perfect control thereafter. ■ It quickly follows disturbances and controls them to suppress their effects. ■ It reaches and controls the set temperature precisely (±0.03 degrees) and rapidly without overshoot or undershoot. *For more details, please request our materials or view the PDF data available for download.

  • Chiller
  • tank

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Plasma Etcher Chiller "ThermoRack1201"

Plasma Etcher Chiller "ThermoRack1201"

Optimal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without the use of refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan for the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Significant reduction in power consumption! Peltier chiller 'ThermoRack1201'

Significant reduction in power consumption! Peltier chiller 'ThermoRack1201'

Optimal for plasma etching in semiconductor manufacturing! Up to 93% reduction in power consumption! Prevents noise and vibration as well!

The "ThermoRack1201" is a temperature control chiller that can control cooling and heating with quick temperature responsiveness and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving quality variations between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it continues to operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Temperature Control Chiller 'NIKOLA3K/5K'

Temperature Control Chiller 'NIKOLA3K/5K'

High cooling capacity Peltier chiller without refrigerant gas, ideal for plasma etching in semiconductor manufacturing processes! Reduces power consumption by up to 60%! Prevents noise and vibration as well!

The "NIKOLA3K/5K" is a high-cooling capacity Peltier chiller that can control cooling and heating with a rapid temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, which can improve the quality variation between wafers and lots. Compatible with major etcher manufacturers' products! The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining approximately 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration

  • Chiller

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Significant reduction in power consumption! Peltier chiller 'ThermoRack1801'

Significant reduction in power consumption! Peltier chiller 'ThermoRack1801'

Optimal for plasma etching in semiconductor manufacturing! Up to 93% reduction in power consumption! Also prevents noise and vibration!

The "ThermoRack1801" is a temperature control chiller that can control cooling and heating with a quick temperature response and a temperature stability of ±0.05℃, without using refrigerants. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it can operate while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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Plasma Etcher Chiller ThermoRack 1201/1801

Plasma Etcher Chiller ThermoRack 1201/1801

Ideal for plasma etching in semiconductor manufacturing processes! Up to 93% reduction in power consumption! Also prevents noise and vibration!

The "ThermoRack1201/1801" is a temperature control chiller that uses no refrigerants and can control cooling and heating with rapid temperature response and a temperature stability of ±0.05℃. It features a design optimized for plasma etching in semiconductor manufacturing processes, improving the quality variation between wafers and lots. The temperature control unit consists of seven Peltier devices, and even if one device malfunctions, it operates while maintaining about 85% of its capacity. 【Features】 ■ Reduces power consumption by up to 93% ■ Reduces cooling water usage by up to 60% ■ Simple design with only a pump and cooling fan in the drive unit ■ Reduces noise and vibration ■ Compact size that fits in a 19-inch rack, saving space

  • Chiller

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